Description
ULVAC XU-MVS3122 Wafer Robot – Precision Semiconductor Handling
Precision semiconductor handling with high reliability and contamination control
| Brand | ULVAC |
| Model | XU-MVS3122 |
| Voltage | 200V AC |
| Country of Origin | Japan |
| Weight | 200 kg |
| Dimensions | 1500 x 1000 x 1500 mm |
| Warranty | 2 years |
| Certifications | CE, SEMI S2 |
| SKU / MPN | XU-MVS3122 |
| What’s in the box | Robot arm, controller module, interconnect cables, mounting kit, user manual |
| Payload Capacity | 5 kg |
| Reach | 1000 mm |
| Number of Axes | 4 |
| Repeatability | ±0.1 mm |
| Wafer Size | 300 mm |
| Maximum Speed | 2 m/s |
Key benefits: Increases yield, reduces downtime, cleanroom compatible, long service life
Typical applications: Wafer transfer, semiconductor fabrication, cleanroom automation
Order number: ULVAC XU-MVS3122 Wafer Robot – Precision Semiconductor Handling
Lifecycle: Active
Documentation: Available on request
Typical applications: Wafer transfer, semiconductor fabrication, cleanroom automation
Order number: ULVAC XU-MVS3122 Wafer Robot – Precision Semiconductor Handling
Lifecycle: Active
Documentation: Available on request
Daniel W. –
The variable frequency drive was calibrated easily. Works like a charm.