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Semiconductor Vacuum Process Gauge MKS 631A11TBEH3 Sensor

631A11TBEH3
★★★★☆4.0 (1 review)
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MKS 631A11TBEH3

High-accuracy capacitance manometer for precise vacuum pressure measurement in demanding process environments

Brand MKS
Model 631A11TBEH3
Voltage ±15V DC
Country of Origin USA
Weight 0.5 kg
Dimensions 90 x 40 x 40 mm
Warranty 90 days (used item)
Certifications CE, RoHS
SKU / MPN 631A11TBEH3
What’s in the box Baratron pressure transducer, calibration certificate, manual
Sensor Type Capacitance Manometer (Baratron)
Pressure Range 0.1 to 1000 Torr
Accuracy 0.25% of Reading
Output Signal 0-10 V DC linear
Fitting Type 1/2 inch OD tube
Operating Temperature 0°C to 50°C

Key benefits: Industry-leading 0.25% accuracy, excellent long-term stability, corrosion-resistant Inconel sensor, wide measurement range, reliable performance in vacuum processes

Typical applications: Semiconductor wafer fabrication, thin-film deposition systems, vacuum coating, optical coating, research laboratories, plasma etching, vacuum furnace processes

Lifecycle: Mature product, long-term availability through MKS service and replacement channels

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