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Home›Industrial Automation Controls›Semiconductor Vacuum Monitoring with MKS 631C13TBFP Gauge
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Semiconductor Vacuum Monitoring with MKS 631C13TBFP Gauge

631C13TBFP
★★★★☆4.0 (1 review)
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MKS 631C13TBFP

High-accuracy capacitance manometer for reliable vacuum pressure measurement in demanding process environments

Brand MKS
Model 631C13TBFP
Voltage 24V DC
Country of Origin USA
Weight 1.13 kg
Dimensions 150 x 80 x 80 mm
Warranty 12 months
Certifications CE, RoHS, SEMI
SKU / MPN 631C13TBFP
What’s in the box Vacuum Pressure Gauge, calibration certificate, quick start guide
Pressure Range 1000 Torr (1333 mbar)
Sensor Type Capacitance Manometer (Baratron)
Accuracy 0.25% of Reading
Output Signal 0-10 V DC analog
Fitting Type 1/2 inch Tube Fitting
Operating Temperature 0 to 50°C

Key benefits: Exceptional 0.25% accuracy, robust Baratron sensor technology, corrosion-resistant Inconel wetted parts, stable zero drift performance, easy analog integration

Typical applications: Semiconductor process control, vacuum furnace monitoring, thin-film deposition systems, load lock pressure control, analytical instruments, R&D vacuum systems

Lifecycle: Active product, MKS supports long-term availability for installed base

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