Excellent built quality. Integrated easily into our existing control system.
🔍 Hover to zoomHigh-accuracy, temperature-controlled capacitance manometer delivering reliable, drift-free vacuum measurement for demanding process environments
| Brand | MKS |
| Model | 626BX13TDE |
| Voltage | ±15 V DC |
| Country of Origin | United States |
| Weight | 0.6 kg |
| Dimensions | 127 x 38 x 38 mm |
| Warranty | 12 months |
| Certifications | CE, RoHS, SEMI S2 |
| SKU / MPN | 626BX13TDE |
| What’s in the box | 626BX13TDE Vacuum Gauge, calibration certificate, user manual, protective cap |
| Gauge Type | Heated Capacitance Manometer (Baratron) |
| Full Scale Range | 10 Torr |
| Accuracy | 0.25% of Reading |
| Operating Temperature | 45°C (heated, controlled) |
| Output Signal | 0–10 V DC linear |
| Fitting | 1/2 inch VCR (Swagelok compatible) |
Key benefits: Exceptional 0.25% accuracy, heated 45°C sensor for zero drift, fast response time, robust stainless-steel construction, SEMI-compliant for semiconductor use, long-term calibration stability
Typical applications: Semiconductor process chambers, thin-film deposition, etch and CVD tools, vacuum furnace control, research laboratories, high-purity gas delivery systems
Lifecycle: Active product, supported by MKS Instruments with long-term availability for installed-base service and spares
Excellent built quality. Integrated easily into our existing control system.
Please contact us if you need product documentation or technical information.
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