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Semiconductor Process Control MKS 870B13TCB4GA1 Sensor

870B13TCB4GA1
★★★★★5.0 (1 review)
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MKS 870B13TCB4GA1

High-precision vacuum measurement for demanding semiconductor and thin-film processes

Brand MKS
Model 870B13TCB4GA1
Voltage 24V DC
Country of Origin USA
Weight 0.5 kg
Dimensions 120x60x40 mm
Warranty 24 months
Certifications CE, RoHS
SKU / MPN 870B13TCB4GA1
What’s in the box Vacuum pressure sensor unit, connector kit, calibration certificate, user manual
Pressure Range 0-1000 Torr
Accuracy ±0.25% of reading
Output Signal 0-10 VDC
Operating Temperature 0-50°C
Response Time <10 ms
Process Connection 1/4 inch VCR

Key benefits: Exceptional accuracy, fast response, robust construction, easy integration with MKS control systems

Typical applications: Semiconductor manufacturing, thin-film deposition, vacuum coating, plasma etching, leak detection

Lifecycle: Active product, 5+ years availability

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