The servo amplifier performed well in velocity mode. Documentation was helpful.
🔍 Hover to zoomHigh-accuracy heated vacuum pressure gauge designed for reliable measurements in harsh semiconductor and thin-film process environments
| Brand | MKS |
| Model | 627C21TGCC1B1 |
| Voltage | 24V DC |
| Country of Origin | USA |
| Weight | 0.9 kg |
| Dimensions | 5.4 x 2.3 x 2.3 inches |
| Warranty | 90 days (used product) |
| Certifications | CE, RoHS, UL |
| SKU / MPN | 627C21TGCC1B1 |
| What’s in the box | Vacuum pressure gauge unit, calibration certificate, user manual |
| Measurement Type | Heated Capacitance Manometer |
| Pressure Range | 1000 Torr (1333 mbar) |
| Accuracy | 0.5% of Reading |
| Operating Temperature | 0°C to 150°C (heated at 100°C) |
| Output Signal | 0-10V DC analog |
| Fitting Type | 1/2 inch VCR |
Key benefits: High-temperature stability, low zero drift, robust heated sensor design, excellent accuracy and repeatability, compact footprint, industry-proven MKS reliability
Typical applications: Semiconductor wafer processing, thin-film deposition, plasma etch chambers, vacuum furnace control, sputtering systems, R&D vacuum systems
Lifecycle: Mature product, long-term support available through MKS service network
The servo amplifier performed well in velocity mode. Documentation was helpful.
Please contact us if you need product documentation or technical information.
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