The VFD works perfectly with our motor setup. Great communication from seller.
π Hover to zoomReliable replacement control board for Brooks Automation semiconductor handling and automation equipment
| Brand | Brooks Automation |
| Model | 002-6878-04 |
| Voltage | 24V DC |
| Country of Origin | USA |
| Weight | 0.45 kg |
| Dimensions | 180 x 120 x 25 mm |
| Certifications | CE, UL, RoHS |
| SKU / MPN | 002-6878-04 |
| Whatβs in the box | Board unit, mounting hardware, documentation |
| Board Type | Control/Interface PCB |
| Compatibility | Brooks Automation SLM Series and wafer handling systems |
| Operating Temperature | 0Β°C to 60Β°C |
| Connector Type | Multi-pin industrial connector |
| Function | Motion/Process Control Interface |
| Compliance | Semiconductor industry standard |
Key benefits: OEM-compatible design, robust industrial-grade construction, easy drop-in replacement, long-term reliability, supports legacy automation systems
Typical applications: Wafer handling systems, semiconductor fabrication equipment, vacuum transfer systems, automated load locks, precision motion controllers
Lifecycle: Mature legacy part, limited availability through industrial automation suppliers
The VFD works perfectly with our motor setup. Great communication from seller.
Please contact us if you need product documentation or technical information.
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